Symmetric flow valve for flow conductance control

ABSTRACT

Embodiments of symmetric flow valves for use in a substrate processing chamber are provided herein. In some embodiments, a symmetric flow valve includes a valve body having sidewalls, a bottom plate, and a top plate that together define an interior volume, wherein the top plate includes one or more axisymmetrically disposed openings; a poppet disposed in the interior volume, wherein the poppet includes a central opening and a plurality of portions configured to selectively seal the one or more axisymmetrically disposed openings of the top plate when the symmetric flow valve is in a closed position; and a first actuator coupled to the poppet to position the poppet within the interior volume in at least an open position, where the poppet is spaced apart from the top plate to allow flow through the one or more axisymmetrically disposed openings of the top plate, and the closed position.

CROSS-REFERENCE TO RELATED PATENT APPLICATIONS

This application is a continuation of and claims the benefit of U.S.patent application Ser. No. 16/542,798, filed Aug. 16, 2019, which isherein incorporated by reference in its entirety.

FIELD

Embodiments of the present disclosure generally relate to semiconductorprocessing equipment.

BACKGROUND

Substrate processing chambers generally are coupled to a vacuum systemhaving a vacuum pump to exhaust the substrate processing chamber.However, the inventors have found existing flow valves in substrateprocessing chamber can cause choked flow, hindering flow conductance toa vacuum pump coupled to the substrate processing chamber.

Accordingly, the inventors have provided an improved flow valve toprovide higher flow conductance.

SUMMARY

Embodiments of symmetric flow valves for use in a substrate processingchamber are provided herein. In some embodiments, a symmetric flow valvefor use in a substrate processing chamber includes a valve body havingsidewalls, a bottom plate, and a top plate that together define aninterior volume, wherein the top plate includes one or moreaxisymmetrically disposed openings, and wherein the bottom plateincludes an opening configured to interface with a pump port; a poppetdisposed in the interior volume, wherein the poppet includes a centralopening and a plurality of portions configured to selectively seal theone or more axisymmetrically disposed openings of the top plate when thesymmetric flow valve is in a closed position; and a first actuatorcoupled to the poppet to position the poppet within the interior volumein at least an open position, where the poppet is spaced apart from thetop plate to allow flow through the one or more axisymmetricallydisposed openings of the top plate, and the closed position.

In some embodiments, a symmetric flow valve for use in a substrateprocessing chamber includes: a valve body having sidewalls, a bottomplate, and a top plate to define an interior volume, wherein the bottomplate includes an opening configured to interface with a pump port, andwherein the top plate includes three openings arranged asymmetricallyabout a center of the top plate; a poppet disposed in the interiorvolume and having a central opening, wherein the poppet includes threeraised portions corresponding to the three openings of the top plate;and a plurality of actuators coupled to the poppet to raise or lower thepoppet within the interior volume between an open position, where thepoppet is spaced from the top plate to allow gas flow through thesymmetric flow valve, and a closed position, where the three raisedportions cover the three openings of the top plate to substantiallyprevent gas flow through the symmetric flow valve.

In some embodiments, a substrate processing chamber includes a chamberbody; a symmetric flow valve comprising: a valve body having sidewalls,a bottom plate, and a top plate that together define an interior volume,wherein the top plate includes one or more axisymmetrically disposedopenings, and wherein the bottom plate includes one or more openingsconfigured to interface with a pump port, a poppet disposed in theinterior volume and having a plurality of portions, and a plurality ofactuators coupled to the poppet, wherein the plurality of actuators areconfigured to move the poppet between an open position, where the poppetis spaced from the top plate to allow gas flow through the symmetricflow valve, and a closed position, where the plurality of portions coverthe one or more axisymmetrically disposed openings of the top plate tosubstantially prevent gas flow through the symmetric flow valve; and apump coupled to each of the one or more openings of the bottom plate.

Other and further embodiments of the present disclosure are describedbelow.

BRIEF DESCRIPTION OF THE DRAWINGS

Embodiments of the present disclosure, briefly summarized above anddiscussed in greater detail below, can be understood by reference to theillustrative embodiments of the disclosure depicted in the appendeddrawings. However, the appended drawings illustrate only typicalembodiments of the disclosure and are therefore not to be consideredlimiting of scope, for the disclosure may admit to other equallyeffective embodiments.

FIG. 1A depicts a cross sectional side view of a symmetric flow valve ina closed position in accordance with some embodiments of the presentdisclosure.

FIG. 1B depicts a cross sectional side view of a symmetric flow valve inan open position in accordance with some embodiments of the presentdisclosure.

FIG. 2 depicts an exploded isometric view of a substrate processingchamber having a symmetric flow valve in accordance with someembodiments of the present disclosure.

FIG. 3 depicts an exploded isometric view of a symmetric flow valve inaccordance with some embodiments of the present disclosure.

FIG. 4 depicts a top view of a symmetric flow valve in accordance withsome embodiments of the present disclosure.

FIG. 5 depicts a schematic isometric view of a symmetric flow valve inaccordance with some embodiments of the present disclosure.

FIG. 6A depicts a top view of a poppet in accordance with someembodiments of the present disclosure.

FIG. 6B depicts a bottom view of the poppet of FIG. 6A.

FIG. 7A depicts a top isometric view of a poppet in accordance with someembodiments of the present disclosure.

FIG. 7B depicts a bottom isometric view of the poppet of FIG. 7A.

FIG. 8A depicts a top isometric view of a poppet in accordance with someembodiments of the present disclosure.

FIG. 8B depicts a bottom isometric view of the poppet of FIG. 8A.

FIG. 9 depicts a top isometric view of a poppet in accordance with someembodiments of the present disclosure.

FIG. 10 depicts a top isometric view of a poppet in accordance with someembodiments of the present disclosure.

To facilitate understanding, identical reference numerals have beenused, where possible, to designate identical elements that are common tothe figures. The figures are not drawn to scale and may be simplifiedfor clarity. Elements and features of one embodiment may be beneficiallyincorporated in other embodiments without further recitation.

DETAILED DESCRIPTION

Embodiments of a symmetric flow valve for use in a substrate processingchamber are provided herein. The symmetric flow valve is configured toreduce or prevent choked flow at an interface between a chamber bodywhen a pump is evacuating an interior volume of the chamber body. Thesymmetric flow valve advantageously facilitates a bigger capacity pumpinstalled on an existing substrate processing chamber with minimum or nochange to the chamber body. In some embodiments, the symmetric flowvalve may be installed on a substrate processing chamber initiallyconfigured to pump about 4000 to about 5000 liters per second through anexisting flow valve, after which the substrate processing chamber canpump about 6500 to about 7500 liters per second through the symmetricflow valve.

FIG. 1A depicts a cross sectional side view of a symmetric flow valve110 in a closed position in accordance with some embodiments of thepresent disclosure. In some embodiments, the symmetric flow valve 110 isdisposed between a chamber body 104 and a pump 130. The symmetric flowvalve 110 includes a valve body 102 having sidewalls 108, a bottom plate106, and a top plate 112. The sidewalls 108, the bottom plate 106, andthe top plate 112 together define an interior volume 114 of the valvebody 102. In some embodiments, the valve body 102 has a width of about25.0 inches to about 33.0 inches. In some embodiments, the valve body102 has a height of about 5.0 inches to about 9.0 inches. The valve bodycan also have other dimensions scaled accordingly to interface withsubstrate processing chambers and pumps having different sizes.

In some embodiments, the top plate 112 includes one or more openings120. In some embodiments, the one or more openings 120 areaxisymmetrically disposed with respect to a central axis of an interiorprocessing volume of the chamber body 104. In some embodiments, the oneor more openings 120 are three openings (See FIG. 2 ). In someembodiments, the one or more openings 120 is one opening (See FIG. 4 ).In some embodiments, the top plate 112 is substantially the same sizeand geometry as the bottom plate 106. The top plate 112 may includeopenings to receive fasteners to couple the top plate 112 to the chamberbody 104.

The bottom plate 106 includes an opening 118 configured to interfacewith a pump port 122. A poppet 126 is disposed in the interior volume114 between the top plate 112 and the bottom plate 106. The poppet 126includes a central opening 136. The poppet 126 may be made of aluminum,stainless steel, or any other suitable material. In some embodiments,the poppet 126 has a thickness of about 0.5 inches to about 2.5 inches.In some embodiments the central opening 136 is circular in shape. Insome embodiments, the poppet 126 includes a plurality of wings 132extending radially outward from the poppet 126. In some embodiments, theplurality of wings 132 is two wings diametrically opposed to each otherabout the poppet 126. In some embodiments, the plurality of wings 132extend through corresponding openings 128 in the sidewalls 108 of thevalve body 102. In some embodiments, the plurality of wings 132 areremoveably coupled from the remainder of the poppet 126.

In some embodiments, each one of the plurality of wings 132 includes acoupling element to receive an actuator. For example, as shown in FIG.1A, a first actuator 142 having a first shaft 146 is coupled to one ofthe plurality of wings 132 and a second actuator 144 having a secondshaft 148 is coupled to another one of the plurality of wings 132. Thefirst actuator 142 and the second actuator 144 are configured toposition the poppet 126 in at least an open position and a closedposition. The first actuator 142 and the second actuator 144 areconfigured to position the poppet within the interior volume 114 toadvantageously control the flow conductance through the symmetric flowvalve 110. In some embodiments, the first actuator 142 and the secondactuator 144 are coupled to an outer surface of the sidewalls 108 of thevalve body 102. In some embodiments, the first actuator 142 and thesecond actuator 144 are coupled to an upper surface of the top plate112. In some embodiments, a stroke length of the first actuator 142 andthe second actuator 144 is about 3.0 inches to about 4.0 inches.

In the closed position, as shown in FIG. 1A, the poppet 126 is disposedadjacent the top plate 112. The poppet 126 is configured to selectivelyseal the one or more openings 120 of the top plate 112 when thesymmetric flow valve 110 is in the closed position. FIG. 1B depicts across sectional side view of a symmetric flow valve in an open positionin accordance with some embodiments of the present disclosure. In theopen position, the poppet 126 is spaced apart from the top plate 112 toallow flow through the one or more openings 120. In some embodiments thetop plate 112 is removeably coupled to the remainder of the valve body102 to advantageously provide easy installation and removal of thepoppet 126.

FIG. 2 depicts an exploded isometric view of a substrate processingchamber 202 having a symmetric flow valve 110 in accordance with someembodiments of the present disclosure. The substrate processing chamber202 is configured to process a substrate disposed therein. For example,the substrate processing chamber 202 may be an etching chamber, aphysical vapor deposition chamber, or a chemical vapor depositionchamber. However, other types of substrate processing chambersconfigured for different processes can also use or be modified for usewith embodiments of the symmetric flow valve 110 described herein. Thesubstrate processing chamber 202 may be a stand-alone substrateprocessing chamber or part of a multi-chamber processing tool. In someembodiments, the valve body 102 has a substantially rectangular shape.In some embodiments, as shown in FIG. 2 , the poppet 126 and theplurality of wings 132 are completely disposed within the valve body102. In some embodiments, the first actuator 142 and the second actuator144 are coupled to a bottom surface of the bottom plate 106.

In some embodiments, the sidewalls 108 of the valve body 102 include oneor more service doors 206 to service components within the interiorvolume 114. In some embodiments, the top plate 112 includes an o-ringgroove 208 to accommodate an o-ring to provide a seal when the top plate112 is coupled to the chamber body 104. The poppet includes a pluralityof portions 210 configured to selectively seal the one or more openings120 of the top plate 112 when the symmetric flow valve 110 is in theclosed position.

FIG. 3 depicts an exploded isometric view of a symmetric flow valve inaccordance with some embodiments of the present disclosure. In someembodiments, the valve body 102 has an octagon shape. In someembodiments, the poppet 126 includes a plurality of cover plates 302coupled to corresponding ones of the plurality of portions 210. Theplurality of cover plates 302 may be advantageously replaced withouthaving to replace the entire poppet 126. In some embodiments, theplurality of cover plates 302 may be raised with respect to a topsurface 304 of the poppet 126. In some embodiments, the poppet 126includes one or more recesses 306 extending radially outward from thecentral opening. The one or more recesses 306 are configured to reduce aweight of the poppet 126 and provide a larger opening for flowconductance.

FIG. 4 depicts a top view of a symmetric flow valve in accordance withsome embodiments of the present disclosure. In some embodiments, thechamber body 104 includes a floor 404 having a plurality of spokes 406extending radially outward to define a plurality of axisymmetric chamberports 416 therebetween. In some embodiments the plurality ofaxisymmetric chamber ports 416 includes three ports. In someembodiments, the symmetric flow valve 110 is coupled to three smallerpumps that are configured to provide a flow conductance similar to thepump 130 that is larger. In some embodiments, the bottom plate 106includes a first circular opening 412, a second circular opening 422,and a third circular opening 432 disposed axisymmetrically.

A first poppet 414, a second poppet 424, and a third poppet 434 aredisposed in the valve body 102 and are configured to selectively sealthe first circular opening 412, the second circular opening 422, and thethird circular opening 432, respectively, when the symmetric flow valve110 is in a closed position. In some embodiments, the first poppet 414,the second poppet 424, and the third poppet 434 are coupled to a firstactuator 410, a second actuator 420, and a third actuator 430,respectively, to selectively raise or lower the first poppet 414, thesecond poppet 424, and the third poppet 434 between at least the closedposition and an open position. In the open position, the first poppet414, the second poppet 424, and the third poppet 434 are raised withrespect to the bottom plate 106.

In some embodiments, the first circular opening 412, the second circularopening 422, and the third circular opening 432 are disposed directlybelow the plurality of spokes 406 to provide increased pumpingefficiency. In some embodiments, the first circular opening 412, thesecond circular opening 422, and the third circular opening 432 aredisposed between adjacent spokes 406 so that the three smaller pumps arein line with the axisymmetric chamber ports 416 to provide more uniformflow conductance.

FIG. 5 depicts a schematic isometric view of a symmetric flow valve inaccordance with some embodiments of the present disclosure. In someembodiments, the valve body 102 has a hexagon shape. In someembodiments, as shown in FIG. 5 , the symmetric flow valve 110 includesa first actuator 502, a second actuator 504, and a third actuator 506disposed about the top plate 112. In some embodiments, each of theactuators are mounted to a same side of the valve body 102. In someembodiments, at least one of the actuators is mounted to a differentside of the valve body 102. For example, as depicted in FIG. 5 , in someembodiments, the first actuator 502 and the second actuator 504 arecoupled to an upper surface of the top plate 112. In some embodiments,the valve body 102 includes a service door 206 adjacent each of thefirst actuator 502 and the second actuator 504 to facilitate poppetservice. In some embodiments, the third actuator 506 is coupled to atleast one of the sidewall 108 and the bottom plate 106 of the valve body102 and extends in a direction opposite the first actuator 502 and thesecond actuator 504 to advantageously provide easy servicing to thesymmetric flow valve 110 and to reduce interference with bottomcomponents. Three actuators 502, 504, 506, advantageously reduce adeflection of the poppet 126.

In some embodiments, a rough pump port 520 is disposed in the top plate112. In some embodiments, rough pump channels 510 extend between eachopening of the one or more openings 120 of the top plate 112 and arefluidly coupled to the rough pump port 520. In some embodiments, therough pump channels 510 are embedded within the top plate 112. In someembodiments, the rough pump channels 510 are trenches that extend froman upper surface of the top plate 112 into the top plate 112. The roughpump port 520 is configured to provide rough pumping of the substrateprocessing chamber 202 when the symmetric flow valve 110 is in a closedposition and prior to high vacuum pumping by the pump 130. In someembodiments, the rough pump channels 510 create a cross or “plus” shapewith a center of the cross or “plus” shape disposed between all of theopenings of the one or more openings 120. In some embodiments, the roughpump channels 510 create a cross or “plus” shape with a center of thecross or “plus” shape disposed proximate a periphery of the top plate112 between adjacent openings of the one or more openings 120. In someembodiments, the rough pump channels 510 have a diameter of about 0.3inches to about 0.7 inches.

FIG. 6A depicts a top view of a poppet in accordance with someembodiments of the present disclosure. In some embodiments, the poppet126 includes one or more slots 602 disposed between adjacent portions210 of the plurality of portions 210. The one or more slots 602advantageously improve flow conductance through the poppet 126 andfurther reduce a weight of the poppet 126. In some embodiments, the oneor more slots 602 include four slots.

FIG. 6B depicts a bottom view of the poppet of FIG. 6A. In someembodiments, the poppet 126 includes cutouts 604 on a bottom surface 608of the poppet 126 positioned directly below the plurality of portions210. The cutouts 604 advantageously reduce the weight of the poppet 126.In some embodiments, the poppet 126 includes ribs 606 disposed withinthe cutouts 604 to increase stiffness of the poppet 126. The ribs 606can be provided in any geometric pattern desired to increase thestiffness of the poppet, such as for example, a zig-zag pattern (asdepicted in FIG. 6B), a radial pattern, a honeycomb pattern, or thelike. While two wings 132 of the plurality of wings 132 are shown in thepoppets 126 of FIGS. 6A and 6A, the poppet 126 may include three or fourwings 132 when used with embodiments of the symmetric flow valve 110having three or four actuators, respectively.

FIGS. 7A and 7B depict a top isometric view and a bottom isometric view,respectively, of a poppet in accordance with some embodiments of thepresent disclosure. In some embodiments, the poppet 126 includes threerecesses 306 extending radially outward form the central opening 136. Insome embodiments, the bottom surface 608 of the poppet 126 includes anannular cutout 704. In some embodiments, the annular cutout 704 extendsbetween a first sidewall 712 defined by the central opening 136 and thethree recesses 306 and a second sidewall 714 defined by an outer surfaceof the poppet 126. The annular cutout 704 advantageously reduces aweight of the poppet 126. In some embodiments, the poppet 126 includesone or more coupling elements 702 extending radially inward from thesecond sidewall 714 to accommodate coupling with two or more actuatorsof the symmetric flow valve 110 (e.g., actuators 142, 144, 502, 504,506). In some embodiments, the one or more coupling elements 702 arecoupled to one or more actuators (e.g., actuators 142, 144, 502, 504,506). disposed on the top plate 112 of the valve body 102.

FIGS. 8A and 8B depict a top isometric view and a bottom isometric view,respectively, of a poppet in accordance with some embodiments of thepresent disclosure. In some embodiments, the poppet 126 includes threeslots 602 disposed between adjacent portions 210 of the plurality ofportions 210. In some embodiments, the bottom surface 608 of the poppet126 includes cutouts 604 positioned directly below the plurality ofportions 210. In some embodiments, at least two of the cutouts 604include a coupling element 802 extending radially inward from a sidewallof the cutout 604 to accommodate coupling with two or more actuators ofthe symmetric flow valve 110 (e.g., actuators 142, 144, 502, 504, 506).

FIG. 9 depicts a top isometric view of a poppet in accordance with someembodiments of the present disclosure. In some embodiments, the poppet126 includes a plurality of spokes 902 extending from a center of thepoppet 126 to the central opening 136. The plurality of spokes 902advantageously provide additional structural support to the poppet 126.In some embodiments, the plurality of spokes 902 comprises three spokes.In some embodiments, the poppets 126 of FIG. 7A through FIG. 9 includethe plurality of wings 132. In some embodiments, any of the poppets 126disclosed herein include a combination of one or more wings 132 and oneor more coupling elements 702, 802.

FIG. 10 depicts a top isometric view of a poppet in accordance with someembodiments of the present disclosure. In some embodiments, theplurality of wings 132 of the poppet 126 includes four wings 132. Insome embodiments, the symmetric flow valve 110 includes four actuatorsconfigured to couple with the four wings 132. Symmetric flow valves 110having four actuators advantageously provides additional support to thepoppet 126 and reduces deformation of the poppet 126. In someembodiments, the four actuators may be placed on an upper surface of thetop plate 112. In some embodiments, the four actuators may be coupled toat least one of the sidewalls 108 and the bottom plate 106.

While the foregoing is directed to embodiments of the presentdisclosure, other and further embodiments of the disclosure may bedevised without departing from the basic scope thereof.

The invention claimed is:
 1. A symmetric flow valve for use in asubstrate processing chamber, comprising: a valve body having sidewalls,a bottom plate, and a top plate that together define an interior volume,wherein the valve body includes a plurality of axisymmetrically disposedopenings comprising three or more openings arranged in a non-linearmanner, wherein a first opening of the plurality of axisymmetricallydisposed openings is configured to interface with a pump port, whereinthe top plate includes an opening, and wherein all of the plurality ofaxisymmetrically disposed openings are disposed radially inward of anouter diameter of the opening of the top plate; a first poppet coupledto a first actuator to move the first poppet between at least a closedposition and an open position to selectively seal the first opening; anda second poppet coupled to a second actuator to move the second poppetbetween at least a closed position and an open position to selectivelyseal a second opening of the plurality of axisymmetrically disposedopenings.
 2. The symmetric flow valve of claim 1, further comprising athird poppet coupled to a third actuator to move the third poppetbetween at least a closed position and an open position to selectivelyseal a third opening of the plurality of axisymmetrically disposedopenings.
 3. The symmetric flow valve of claim 1, wherein the secondopening is configured to interface with a second pump port.
 4. Thesymmetric flow valve of claim 1, wherein at least one of: the valve bodyincludes a service door on one or more sidewalls to facilitate poppetservice, or wherein the valve body has a rectangular, hexagon, oroctagon shape.
 5. The symmetric flow valve of claim 1, wherein the firstactuator is coupled to the bottom plate of the valve body or the topplate of the valve body.
 6. The symmetric flow valve of claim 1, whereinthe first poppet includes one or more cutouts extending from a bottomsurface of the first poppet towards an upper surface of the firstpoppet.
 7. The symmetric flow valve of claim 1, wherein the pump port isdisposed in the bottom plate.
 8. The symmetric flow valve of claim 1,wherein the first opening is coupled to a first pump and the secondopening is coupled to a second pump different than the first pump.
 9. Asymmetric flow valve for use in a substrate processing chamber,comprising: A valve body having sidewalls, a bottom plate, and a topplate that together define an interior volume, wherein the valve bodyincludes a plurality of axisymmetrically disposed openings arrangedabout an axis that is perpendicular to the bottom plate, wherein anangle between respective centers of the plurality of axisymmetricallydisposed openings with respect to the axis is less than 180 degrees,wherein the valve body defines a flow path extending into the interiorvolume through the top plate and out of the interior volume through theplurality of axisymmetrically disposed openings, and wherein each of theplurality of axisymmetrically disposed openings are configured tointerface with a pump port, wherein the top plate includes an opening,and wherein all of the plurality of axisymmetrically disposed openingsare disposed radially inward of an outer diameter of the opening of thetop plate; and a plurality of poppets configured to selectively sealcorresponding ones of the plurality of axisymmetrically disposedopenings by selectively moving between at least a closed position and anopen position.
 10. The symmetric flow valve of claim 9, wherein theplurality of axisymmetrically disposed openings comprise three openingsdisposed in the bottom plate.
 11. The symmetric flow valve of claim 9,wherein the plurality of poppets are made of aluminum or stainlesssteel.
 12. The symmetric flow valve of claim 9, further comprising aplurality of actuators coupled to respective ones of the plurality ofpoppets to move the plurality of poppets between the open position andthe closed position.
 13. The symmetric flow valve of claim 12, whereinat least one of the plurality of actuators is coupled to a sidewall ofthe valve body.
 14. The symmetric flow valve of claim 9, wherein thepump port is a common pump port for the plurality of axisymmetricallydisposed openings disposed vertically below the plurality ofaxisymmetrically disposed openings.
 15. A substrate processing chamber,comprising: a chamber body having a floor, wherein the floor includes aplurality of arc shaped openings; a symmetric flow valve comprising: avalve body having sidewalls, a bottom plate, and a top plate thattogether define an interior volume, wherein the valve body includes aplurality of axisymmetrically disposed openings arranged about andequidistant to an axis passing perpendicular to the top plate and thebottom plate, and wherein each of the plurality of axisymmetricallydisposed openings are configured to interface with a pump port; and aplurality of poppets configured to selectively seal corresponding onesof the plurality of the axisymmetrically disposed openings byselectively moving between at least a closed position and an openposition via a plurality of actuators; and one or more pumps coupled tothe plurality of axisymmetrically disposed openings.
 16. The substrateprocessing chamber of claim 15, wherein the plurality ofaxisymmetrically disposed openings are radially outward of a center ofthe bottom plate.
 17. The substrate processing chamber of claim 15,wherein the substrate processing chamber is configured to pump about6500 to about 7500 liters per second through the symmetric flow valve.18. The substrate processing chamber of claim 15, wherein the pluralityof actuators are coupled to the bottom plate of the valve body or thetop plate of the valve body.
 19. The substrate processing chamber ofclaim 15, wherein the plurality of actuators have a stroke length ofabout 3.0 inches to about 4.0 inches.